Microfabrication and Nanomanufacturing. Micro- and Nanofabrication. Microfabrication Using X-Ray Lithography. Etching, Machining, and Molding High-Aspect. The Size Effect in Micromachining. Mechanical Micromachining. Precision Micro- and Nanogrinding. CVD Diamond Technology for Microtools, NEMS. Laser-Based Micro- and Nanofabricatio. Pulsed Water Drop Micromachining. Diamond Nanogrinding. Nanometric Machining. Nanocrystalline Diamond Deposition Routes and Applications.
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